Kawasaki Cleanroom NX520

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सूचना
विनिर्दिष्टियाँ

The NX520 with 2 links, rigid double arm structure that can easily reach the wafer stages with a high performance space of 200 wafers per hour (WPH) from FOUP to the aligner, and then to the stage with a double arm manipulator, meets the standards of ISO Class 1, standard SEMI-F47 system of immediate solution to the voltage drop and restart of the automatic system when voltage is restored, standard SEMI-S2 environmental protection, personal safety, anti-collision system.

Controller D

D controllers are designed to develop clean room applications comprising a complete digital servo process, standard Ethernet communication port, compact footprint, flexible development of different software, independent operation of two arms and multi-axis controls, uniform servo amplifiers for all axes, standards environmental, health and safety SEMI S2, white room ISO 1.

Specification of the D60 controller

Servo complete digital system
Controlled Axes: Maximum 7 axes
Manual, semi-automatic, fully automatic teaching.
External emergency stop, near security, external stop.
Hardware: RS232C x 1 Ethernet.
Software: K-Utility (original Kawasaki communication command for clean robots).
Energy: Voltage: Single-phase, AC208 V ± 10%, 50/60 Hz. Standard: SEMI F47.
Input signal: Maximum 16 channels.
Output signal: Maximum of 8 channels
Compatible robots series: NS, NT, NX, TT, TX and NV

Specification of the D61 controller

Servo complete digital system
Controlled Axes: Maximum 12 axes
Manual, semi-automatic, fully automatic teaching.
External emergency stop, near security, external stop.
Hardware: RS232C x 2 Ethernet.
Software: K-Utility (original Kawasaki communication command for clean robots).
Energy: Voltage: Single-phase, AC208 V ± 10%, 50/60 Hz. Standard: SEMI F47.
Input signal: Maximum 96 channels
Output signal: Maximum of 80 channels
Compatible robots series: NS, NT, NX, TT, TX and NV

Main specifications

Number of axis: 5
ISO Class 1
Link: 2
Repeatability: ± 0.1 mm (wafer center)
Controller: D60/D61

Motion range (°)

θ axis (rotation JT2)	330°
	440 mm
Z axis (up-down JT3)	832 mm
	336°
X axis (in/out JT4)

W axis - lower (rotation JT6)	336 °

W axis - upper (rotation JT7)

Robot applications

Cleanroom

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